@inproceedings{500d6d9a33b84421ba1d4b4564c0d4a9,
title = "X-ray mirror metrology using SCOTS/deflectometry",
abstract = "SCOTS is a high precision slope measurement technology based on deflectometry. Light pattern on a LCD display illuminates the test surface and its reflected image is used to calculate the surface slope. SCOTS provides a high dynamic range full field measurement of the optics without null optics required. We report SCOTS tests on X-ray mirrors to nm and even sub nm level with precise calibration of the test system. A LCD screen with dots/check board pattern was aligned into the system at the test mirror position to calibrate camera imaging distortion in-situ. System errors were further eliminated by testing and subtracting a reference flat which was also aligned at the same position as the test mirror. A virtual reference based on the ideal shape of the test surface was calculated and subtracted from the test raw data. This makes the test a 'virtual null' test. Two X-ray mirrors were tested with SCOTS. 0.1μrad (rms) slope precision and sub nm (rms) surface accuracy were achieved.",
keywords = "Optical metrology, X-ray optics",
author = "Run Huang and Peng Su and Burge, {James H.} and Mourad Idir",
year = "2013",
doi = "10.1117/12.2024500",
language = "English (US)",
isbn = "9780819496980",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advances in X-Ray/EUV Optics and Components VIII",
note = "Advances in X-Ray/EUV Optics and Components VIII ; Conference date: 26-08-2013 Through 28-08-2013",
}