Writing an arbitrary non-periodic pattern using interference lithography

Stanley K H Pau; G. P. Watson; O. Nalamasu

doi:10.1080/09500340108231764

Writing an arbitrary non-periodic pattern using interference lithography

Stanley K H Pau, G. P. Watson, O. Nalamasu

Research output: Contribution to journal › Article › peer-review

Abstract

We propose a technique to write non-periodic patterns using interference lithography. Arbitrary patterns in one and two dimension are constructed by continuous scanning of multiple coherent sources at various incident angles and intensities.

Original language	English (US)
Pages (from-to)	1211-1223
Number of pages	13
Journal	Journal of Modern Optics
Volume	48
Issue number	7
DOIs	https://doi.org/10.1080/09500340108231764
State	Published - 2001

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1080/09500340108231764

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title = "Writing an arbitrary non-periodic pattern using interference lithography",

abstract = "We propose a technique to write non-periodic patterns using interference lithography. Arbitrary patterns in one and two dimension are constructed by continuous scanning of multiple coherent sources at various incident angles and intensities.",

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Writing an arbitrary non-periodic pattern using interference lithography

Abstract

ASJC Scopus subject areas

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