Writing an arbitrary non-periodic pattern using interference lithography

Stanley K H Pau, G. P. Watson, O. Nalamasu

Research output: Contribution to journalArticlepeer-review


We propose a technique to write non-periodic patterns using interference lithography. Arbitrary patterns in one and two dimension are constructed by continuous scanning of multiple coherent sources at various incident angles and intensities.

Original languageEnglish (US)
Pages (from-to)1211-1223
Number of pages13
JournalJournal of Modern Optics
Issue number7
StatePublished - 2001

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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