Abstract
A system for two-dimensional small rotation-angle measurement is proposed and demonstrated. Because the measurement is not conducted by the interference but the fringe projection, it is basically robust for the external disturbance. While the setup is very simple, there is no requirement on the size of the object. We also proposed two-dimensional two-grating method and a unit that miniaturizes the system. Several measurements confirm us that the measurement accuracy of our proposed system is ∼0.4 arcsec.
Original language | English (US) |
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Article number | 100 |
Pages (from-to) | 185-192 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5633 |
DOIs | |
State | Published - 2005 |
Event | Advanced Materials and Devices for Sensing and Imaging II - Beijing, China Duration: Nov 8 2004 → Nov 10 2004 |
Keywords
- Autocollimator
- Fringe projection
- Rotation-angle measurement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering