@inproceedings{0ae6aad2e8f2415bb78b48b5a0821f84,
title = "Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures",
keywords = "Polysilicon, Self-Assembled monolayers, Stiction, Water dispersible silanes",
author = "Almanza-Workman, {Angeles Marcia} and Srini Raghavan and Pierre Deymier and Monk, {David J.} and Ray Roop",
year = "2001",
doi = "10.4028/www.scientific.net/SSP.76-77.23",
language = "English (US)",
isbn = "9783908450573",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "23--26",
editor = "Marc Heyns and Paul Mertens and Marc Meuris",
booktitle = "Ultra Clean Processing of Silicon Surfaces 2000",
note = "5th International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2000 ; Conference date: 18-09-2000 Through 20-09-2000",
}