Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

Angeles Marcia Almanza-Workman; Srini Raghavan; Pierre Deymier; David J. Monk; Ray Roop

Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop

Research output: Contribution to journal › Conference article › peer-review

Abstract

Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

Original language	English (US)
Pages (from-to)	23-26
Number of pages	4
Journal	Diffusion and Defect Data Pt.B: Solid State Phenomena
Volume	76-77
State	Published - 2000
Event	5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000) - Ostend, Belgium Duration: Sep 18 2000 → Sep 20 2000

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
General Materials Science
Condensed Matter Physics
Physics and Astronomy (miscellaneous)

Cite this

@article{8c351bc81ce34909a671a88fdc565386,

title = "Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures",

abstract = "Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.",

author = "Almanza-Workman, {Angeles Marcia} and Srini Raghavan and Pierre Deymier and Monk, {David J.} and Ray Roop",

year = "2000",

language = "English (US)",

volume = "76-77",

pages = "23--26",

journal = "Diffusion and Defect Data Pt.B: Solid State Phenomena",

issn = "1012-0394",

publisher = "Trans Tech Publications Ltd",

note = "5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000) ; Conference date: 18-09-2000 Through 20-09-2000",

}

TY - JOUR

T1 - Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

AU - Almanza-Workman, Angeles Marcia

AU - Raghavan, Srini

AU - Deymier, Pierre

AU - Monk, David J.

AU - Roop, Ray

PY - 2000

Y1 - 2000

N2 - Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

AB - Increasing concerns regarding the use of organic solvents in work places and the generation of organic wastes has sparked interest in the feasibility of applying highly hydrophobic coatings from predominantly aqueous media. This article discusses the development of the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media.

UR - http://www.scopus.com/inward/record.url?scp=18744424120&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18744424120&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:18744424120

SN - 1012-0394

VL - 76-77

SP - 23

EP - 26

JO - Diffusion and Defect Data Pt.B: Solid State Phenomena

JF - Diffusion and Defect Data Pt.B: Solid State Phenomena

T2 - 5th Internatinal Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000)

Y2 - 18 September 2000 through 20 September 2000

ER -

Wettability modification of polysilicon for stiction reduction in silicon based micro-electromechanical structures

Abstract

ASJC Scopus subject areas

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