@inproceedings{09b1d5b88a19452da66e841022731413,
title = "Wavelength corrected, non-polarizing heterodyne laser interferometry in air",
abstract = "In this research, we present a wavelength corrected, non-polarizing heterodyne laser interferometer for sub-nm accuracy. The basic concept of this interferometer consists of two ideas; one is to correct the optical frequency which can be shifted by the refractive index fluctuation of air in a Fabry-Perot etalon (FPE) and the other is to reduce periodic errors using spatially separated two frequency beams. The simulation and experimental results demonstrated sub-nm accuracy of the proposed interferometer.",
author = "Joo, {Ki Nam} and Ellis, {Jonathan D.} and Spronck, {J. W.} and Schmidt, {Robert H.Munnig}",
note = "Publisher Copyright: {\textcopyright} euspen Headquarters.; 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 ; Conference date: 02-06-2009 Through 05-06-2009",
year = "2009",
language = "English (US)",
series = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",
publisher = "euspen",
pages = "336--339",
editor = "{Van Brussel}, Hendrik and Theresa Burke and H. Spaan and E. Brinksmeier and Theresa Burke and Theresa Burke",
booktitle = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",
}