The authors demonstrate a highly sensitive chemical sensor scheme based on Si3N4 channel waveguides, species-selective surface coatings and Zeeman interferometry. The relative phase change between the TE and TM modes under exposure to toluene vapour is measured. The measurements demonstrate the real-time and reversible response with good sensitivity at low concentrations.
- Chemical sensors
- Light interferometry
- Optical waveguides
ASJC Scopus subject areas
- Electrical and Electronic Engineering