Water dispersible silanes for wettability modification of polysilicon

A. Marcia Almanza-Workman; Srini Raghavan; Pierre Deymier; David J. Monk; Ray Roop

doi:10.1149/1.1423645

Water dispersible silanes for wettability modification of polysilicon

A. Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.

Original language	English (US)
Pages (from-to)	H6-H11
Journal	Journal of the Electrochemical Society
Volume	149
Issue number	1
DOIs	https://doi.org/10.1149/1.1423645
State	Published - Jan 2002

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Materials Chemistry
Surfaces, Coatings and Films
Electrochemistry
Renewable Energy, Sustainability and the Environment

Access to Document

10.1149/1.1423645

Cite this

@article{53fa9eadb47e44e4b45d6998a10bff05,

title = "Water dispersible silanes for wettability modification of polysilicon",

abstract = "The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.",

author = "Almanza-Workman, {A. Marcia} and Srini Raghavan and Pierre Deymier and Monk, {David J.} and Ray Roop",

year = "2002",

month = jan,

doi = "10.1149/1.1423645",

language = "English (US)",

volume = "149",

pages = "H6--H11",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Water dispersible silanes for wettability modification of polysilicon

AU - Almanza-Workman, A. Marcia

AU - Raghavan, Srini

AU - Deymier, Pierre

AU - Monk, David J.

AU - Roop, Ray

PY - 2002/1

Y1 - 2002/1

N2 - The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.

AB - The objective of this research has been to develop the chemistry and techniques for the application of hydrophobic coatings on polysilicon substrates from aqueous media with the ultimate goal of applying these techniques for preventing or reducing release as well as in use stiction in microelectromechanical structure devices. In this paper, the results obtained from a chemical system consisting of a water dispersible silane and a cationic surfactant are presented. Key experimental variables that have been investigated are the concentration of reactive silane and cationic surfactant, type of oxidation pretreatment, pH of the silane dispersion, and curing temperature.

UR - http://www.scopus.com/inward/record.url?scp=0036225574&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036225574&partnerID=8YFLogxK

U2 - 10.1149/1.1423645

DO - 10.1149/1.1423645

M3 - Article

AN - SCOPUS:0036225574

SN - 0013-4651

VL - 149

SP - H6-H11

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 1

ER -

Water dispersible silanes for wettability modification of polysilicon

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this