Vibration-compensated interferometer for surface metrology

Engineering & Materials Science

• Surface measurement 100%
• Interferometers 98%
• Interferometry 64%
• Digital signal processors 58%
• Electrooptical effects 35%
• Phase measurement 34%
• Phase control 33%
• Phase shift 28%
• Speed control 27%
• Modulators 27%

Physics & Astronomy

• metrology 78%
• interferometers 64%
• vibration 52%
• central processing units 32%
• interferometry 27%
• phase control 19%
• active control 18%
• ramps 17%
• electro-optics 15%
• locking 15%
• modulators 13%
• phase shift 13%
• high speed 12%
• high resolution 9%