Vibration-compensated interferometer for measuring cryogenic mirrors

Chunyu Zhao, James H. Burge

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations


An advanced interferometer was built for measuring large mirrors at cryogenic temperatures. This instrument uses active control to compensate the effects of vibration to allow high resolution phase shift interferometry. A digital signal processor and high speed phase control from an electro-optic modulator allow phase measurements at 4000 Hz. These measurements are fed back to a real time servo in the DSP that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. This instrument is planned to be integrated at NASA Marshall Space Flight Center's X-ray Calibration Facility for measuring NGST mirrors at 40 K.

Original languageEnglish (US)
Pages (from-to)399-406
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1999
EventProceedings of the 1999 'Optical Manufacturing and Testing III' - Denver, CO, USA
Duration: Jul 20 1999Jul 23 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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