Very large format back illuminated CCDs

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


The University of Arizona Imaging Technology Laboratoryhas processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated deviceswere produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically -100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.

Original languageEnglish (US)
Pages (from-to)77-82
Number of pages6
JournalExperimental Astronomy
Issue number2
StatePublished - Oct 2002


  • Astronomy
  • Charge-Coupled Device (CCD)
  • Detectors
  • Imaging
  • Silicon

ASJC Scopus subject areas

  • Astronomy and Astrophysics
  • Space and Planetary Science


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