VCSEL applications in sensors and microsystems

M. E. Warren, R. F. Carson, W. C. Sweatt, J. R. Wendt, J. A. Nevers, M. Hagerott Crawford, H. Q. Hou

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


Vertical-cavity surface-emitting lasers (VCSELs) are uniquely suited to miniaturized free-space optical systems in which surface-mounting and hybrid assembly techniques can be used to combine different technologies together. Two examples are described of such microsystems that are being developed for sensing applications. The first example is a optical position sensing system for rotating parts. Progress on fabricating similar systems by flip-chip bonding techniques is then discussed. The second example is a chemical sensing/analysis system which uses a miniature fluorescence detection module that is based on surface-mounted VCSELs and diffractive optical elements. The detection module is integrated with a capillary electrochromatography separation system and uses substrate-mode light propagation to focus the VCSEL beam on the capillary channel.

Original languageEnglish (US)
Pages (from-to)42-51
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
Externally publishedYes
EventVertical-Cavity Surface-Emitting Lasers II - San Jose, CA, United States
Duration: Jan 28 1998Jan 29 1998


  • Capillary electrochromatography
  • Capillary electrophoresis
  • Chemical analysis
  • Diffractive optics
  • Fluorescence spectrometer
  • Microsystems
  • Position sensing
  • Sensors
  • Substrate-mode optical interconnects
  • Vertical-cavity surface-emitting lasers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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