Unsteady characteristics of a thermal microsystem

Linan Jiang, Man Wong, Yitshak Zohar

Research output: Contribution to journalConference articlepeer-review

16 Scopus citations


A novel integrated microsystem consisting of a heater, microchannels and distributed temperature sensors was successfully fabricated. The transient temperature behavior of the device was experimentally studied for a variety of power dissipation levels and forced convection flow rates, where DI water was used as the working fluid. Both heating-up and cooling-down time constants were determined for a pulsed current input. The device frequency response to a sinusoidal input voltage, with the device operating either in a single or in a two-phase mode, was characterized. The dependence of the resulting temperature average and amplitude on the input signal was studied for a variety of cycle conditions. It was found that, contrary to expectations, the heating-up time constant was larger than the cooling-down time constant. Furthermore, the periodic temperature field stabilized the system to avoid the occurrence of the dryout phenomenon.

Original languageEnglish (US)
Pages (from-to)108-113
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number1
StatePublished - May 15 2000
EventThe 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn
Duration: Jun 7 1999Jun 10 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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