Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

S. Iraj Najafi; C. Y. Li; J. E. Chisham; Mark P. Andrews; P. Coudray; A. Malek-Tabrizi; Nasser Peyghambarian

doi:10.1117/12.229957

Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

S. Iraj Najafi
, C. Y. Li
, J. E. Chisham
, Mark P. Andrews
, P. Coudray
, A. Malek-Tabrizi
, Nasser Peyghambarian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	Society of Photo-Optical Instrumentation Engineers
Pages	38-41
Number of pages	4
Volume	2695
ISBN (Print)	0819420697, 9780819420695
DOIs	https://doi.org/10.1117/12.229957
State	Published - 1996
Externally published	Yes
Event	Functional Photonic and Fiber Devices - San Jose, CA, USA Duration: Jan 30 1996 → Feb 1 1996

Other

Other	Functional Photonic and Fiber Devices
City	San Jose, CA, USA
Period	1/30/96 → 2/1/96

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.229957

Cite this

Najafi, S. I., Li, C. Y., Chisham, J. E., Andrews, M. P., Coudray, P., Malek-Tabrizi, A., & Peyghambarian, N. (1996). Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2695, pp. 38-41). Society of Photo-Optical Instrumentation Engineers. https://doi.org/10.1117/12.229957

Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. / Najafi, S. Iraj; Li, C. Y.; Chisham, J. E. et al.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2695 Society of Photo-Optical Instrumentation Engineers, 1996. p. 38-41.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Najafi, SI, Li, CY, Chisham, JE, Andrews, MP, Coudray, P, Malek-Tabrizi, A & Peyghambarian, N 1996, Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2695, Society of Photo-Optical Instrumentation Engineers, pp. 38-41, Functional Photonic and Fiber Devices, San Jose, CA, USA, 1/30/96. https://doi.org/10.1117/12.229957

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abstract = "We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.",

author = "Najafi, \{S. Iraj\} and Li, \{C. Y.\} and Chisham, \{J. E.\} and Andrews, \{Mark P.\} and P. Coudray and A. Malek-Tabrizi and Nasser Peyghambarian",

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doi = "10.1117/12.229957",

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isbn = "0819420697",

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AU - Li, C. Y.

AU - Chisham, J. E.

AU - Andrews, Mark P.

AU - Coudray, P.

AU - Malek-Tabrizi, A.

AU - Peyghambarian, Nasser

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AB - We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.

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BT - Proceedings of SPIE - The International Society for Optical Engineering

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T2 - Functional Photonic and Fiber Devices

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ER -

Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

Abstract

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ASJC Scopus subject areas

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