Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

S. Iraj Najafi, C. Y. Li, J. E. Chisham, Mark P. Andrews, P. Coudray, A. Malek-Tabrizi, Nasser Peyghambarian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages38-41
Number of pages4
Volume2695
ISBN (Print)0819420697, 9780819420695
DOIs
StatePublished - 1996
EventFunctional Photonic and Fiber Devices - San Jose, CA, USA
Duration: Jan 30 1996Feb 1 1996

Other

OtherFunctional Photonic and Fiber Devices
CitySan Jose, CA, USA
Period1/30/962/1/96

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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