TY - GEN
T1 - Ultrashort pulse laser material removal
AU - Dang, Engracia
AU - Chan, Cho Lik
PY - 2002
Y1 - 2002
N2 - Laser material interaction is a very complicated problem. Depending on the pulse length, the mechanism could be thermal or electronic. There are three regimes of pulse length: long (> ns), short (> ps and < ns), and ultrashort (< ps) pulses. In the long pulse regime, the laser energy in most cases can be modeled as a surface heat source. The deposited energy melts and vaporizes the substrate. The material is removed in the form of vapor and liquid. Depending in the material, if the pulse length is short enough, the laser energy first absorbed by the electrons does not have enough time to equilibrate with the lattice. In this case, the electron and lattice temperatures are different. Consequently, the ususal local thermal equilibrium does not apply. Two-temperature models have been used by a number of researchers to model the interaction. In the ultrashort regime, the laser material interaction is through electron excitation, such as avalanche, impact, multiphoton, and strong optical field ionizations. These hot electrons equilibrate with themselves very rapidly, in the order of femtoseconds. As the electrons are excited from their ground states, the bonding between the nuclei are weakened. The Coulomb force causes the material to expand. In this paper, we postulate that the material removal is due to Coulomb explosion. A simple model is developed to model the Coulomb explosion. The model can then be used to predict the material removal rate.
AB - Laser material interaction is a very complicated problem. Depending on the pulse length, the mechanism could be thermal or electronic. There are three regimes of pulse length: long (> ns), short (> ps and < ns), and ultrashort (< ps) pulses. In the long pulse regime, the laser energy in most cases can be modeled as a surface heat source. The deposited energy melts and vaporizes the substrate. The material is removed in the form of vapor and liquid. Depending in the material, if the pulse length is short enough, the laser energy first absorbed by the electrons does not have enough time to equilibrate with the lattice. In this case, the electron and lattice temperatures are different. Consequently, the ususal local thermal equilibrium does not apply. Two-temperature models have been used by a number of researchers to model the interaction. In the ultrashort regime, the laser material interaction is through electron excitation, such as avalanche, impact, multiphoton, and strong optical field ionizations. These hot electrons equilibrate with themselves very rapidly, in the order of femtoseconds. As the electrons are excited from their ground states, the bonding between the nuclei are weakened. The Coulomb force causes the material to expand. In this paper, we postulate that the material removal is due to Coulomb explosion. A simple model is developed to model the Coulomb explosion. The model can then be used to predict the material removal rate.
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U2 - 10.2351/1.5065726
DO - 10.2351/1.5065726
M3 - Conference contribution
AN - SCOPUS:85088334503
SN - 0912035722
SN - 9780912035727
T3 - ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
BT - ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
PB - Laser Institute of America
T2 - ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics
Y2 - 14 October 2002 through 17 October 2002
ER -