Ultralow dissipation mechanical resonators for quantum optomechanics

Nils J. Engelsen, Sergey A. Fedorov, Amir H. Ghadimi, Mohammad J. Bereyhi, Alberto Beccari, Ryan Schilling, Dalziel J. Wilson, Tobias J. Kippenberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We demonstrate dissipation dilution engineering techniques for ultralow dissipation mechanical resonators. The Si3N4 nanobeams show quality factors (Q) as high as 800 million and Qx f exceeding 1015 Hz-both records at room temperature.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationQELS_Fundamental Science, CLEO_QELS 2019
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580576
StatePublished - 2019
Externally publishedYes
EventCLEO: QELS_Fundamental Science, CLEO_QELS 2019 - San Jose, United States
Duration: May 5 2019May 10 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F128-CLEO_QELS 2019
ISSN (Electronic)2162-2701


ConferenceCLEO: QELS_Fundamental Science, CLEO_QELS 2019
Country/TerritoryUnited States
CitySan Jose

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


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