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Ultrafast and direct imprint of nanostructures in silicon
Stephen Y. Chou
, Chris Keimel
,
Jian Gu
Research output
:
Contribution to journal
›
Article
›
peer-review
486
Scopus citations
Overview
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Material Science
Laser Pulse
16%
Lithography
16%
Nanocrystalline Material
100%
Self Assembly
16%
Silicon
100%
Keyphrases
Laser-assisted
100%
Low Viscosity
33%
Molten Silicon
33%
Rapid Techniques
33%
Engineering
Liquid Layer
50%