Ultra-low dissipation mechanical resonators for cavity optomechanics

Mohammad J. Bereyhi; Amir H. Ghadimi; Sergey A. Fedorov; Alberto Beccari; Ryan Schilling; Dalziel J. Wilson; Nils J. Engelsen; Tobias J. Kippenberg

doi:10.1364/QIM.2019.F5A.67

Ultra-low dissipation mechanical resonators for cavity optomechanics

Mohammad J. Bereyhi
, Amir H. Ghadimi
, Sergey A. Fedorov
, Alberto Beccari
, Ryan Schilling
, Dalziel J. Wilson
, Nils J. Engelsen
, Tobias J. Kippenberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 10¹⁵Hz) of high stress Si₃N₄ nanobeams at room temperature.

Original language	English (US)
Title of host publication	Quantum Information and Measurement, QIM 2019
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580569
DOIs	https://doi.org/10.1364/QIM.2019.F5A.67
State	Published - 2019
Externally published	Yes
Event	Quantum Information and Measurement, QIM 2019 - Rome, Italy Duration: Apr 4 2019 → Apr 6 2019

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F165-QIM 2019
ISSN (Electronic)	2162-2701

Conference

Conference	Quantum Information and Measurement, QIM 2019
Country/Territory	Italy
City	Rome
Period	4/4/19 → 4/6/19

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/QIM.2019.F5A.67

Cite this

Bereyhi, M. J., Ghadimi, A. H., Fedorov, S. A., Beccari, A., Schilling, R., Wilson, D. J., Engelsen, N. J., & Kippenberg, T. J. (2019). Ultra-low dissipation mechanical resonators for cavity optomechanics. In Quantum Information and Measurement, QIM 2019 (Optics InfoBase Conference Papers; Vol. Part F165-QIM 2019). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/QIM.2019.F5A.67

Ultra-low dissipation mechanical resonators for cavity optomechanics. / Bereyhi, Mohammad J.; Ghadimi, Amir H.; Fedorov, Sergey A. et al.
Quantum Information and Measurement, QIM 2019. Optica Publishing Group (formerly OSA), 2019. (Optics InfoBase Conference Papers; Vol. Part F165-QIM 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bereyhi, MJ, Ghadimi, AH, Fedorov, SA, Beccari, A, Schilling, R, Wilson, DJ, Engelsen, NJ & Kippenberg, TJ 2019, Ultra-low dissipation mechanical resonators for cavity optomechanics. in Quantum Information and Measurement, QIM 2019. Optics InfoBase Conference Papers, vol. Part F165-QIM 2019, Optica Publishing Group (formerly OSA), Quantum Information and Measurement, QIM 2019, Rome, Italy, 4/4/19. https://doi.org/10.1364/QIM.2019.F5A.67

@inproceedings{3d940b4245de401b8e2afd70d1af5384,

title = "Ultra-low dissipation mechanical resonators for cavity optomechanics",

abstract = "We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.",

author = "Bereyhi, \{Mohammad J.\} and Ghadimi, \{Amir H.\} and Fedorov, \{Sergey A.\} and Alberto Beccari and Ryan Schilling and Wilson, \{Dalziel J.\} and Engelsen, \{Nils J.\} and Kippenberg, \{Tobias J.\}",

note = "Funding Information: This work was supported by the EU Horizon 2020 Research and Innovation Program under grant agreement no. 732894 (FET Proactive HOT) and the SNF Cavity Quantum Optomechanics project (grant no. 163387). M.J.B. is supported by MSCA ETN-OMT (grant no. 722923). T.J.K acknowledges support from ERC AdG (QuREM, grant no. 320966). All samples were fabricated at the Center for MicroNanoTechnology (CMi) at EPFL. Funding Information: Funding acknowledgements: This work was supported by the EU Horizon 2020 Research and Innovation Program under grant agreement no. 732894 (FET Proactive HOT) and the SNF Cavity Quantum Optomechanics project (grant no. 163387). M.J.B. is supported by MSCA ETN-OMT (grant no. 722923). T.J.K acknowledges support from ERC AdG (QuREM, grant no. 320966). All samples were fabricated at the Center for MicroNanoTechnology (CMi) at EPFL. Publisher Copyright: {\textcopyright} OSA 2019 {\textcopyright} 2019 The Author(s); Quantum Information and Measurement, QIM 2019 ; Conference date: 04-04-2019 Through 06-04-2019",

year = "2019",

doi = "10.1364/QIM.2019.F5A.67",

language = "English (US)",

isbn = "9781943580569",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Quantum Information and Measurement, QIM 2019",

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T1 - Ultra-low dissipation mechanical resonators for cavity optomechanics

AU - Bereyhi, Mohammad J.

AU - Ghadimi, Amir H.

AU - Fedorov, Sergey A.

AU - Beccari, Alberto

AU - Schilling, Ryan

AU - Wilson, Dalziel J.

AU - Engelsen, Nils J.

AU - Kippenberg, Tobias J.

N1 - Funding Information: This work was supported by the EU Horizon 2020 Research and Innovation Program under grant agreement no. 732894 (FET Proactive HOT) and the SNF Cavity Quantum Optomechanics project (grant no. 163387). M.J.B. is supported by MSCA ETN-OMT (grant no. 722923). T.J.K acknowledges support from ERC AdG (QuREM, grant no. 320966). All samples were fabricated at the Center for MicroNanoTechnology (CMi) at EPFL. Funding Information: Funding acknowledgements: This work was supported by the EU Horizon 2020 Research and Innovation Program under grant agreement no. 732894 (FET Proactive HOT) and the SNF Cavity Quantum Optomechanics project (grant no. 163387). M.J.B. is supported by MSCA ETN-OMT (grant no. 722923). T.J.K acknowledges support from ERC AdG (QuREM, grant no. 320966). All samples were fabricated at the Center for MicroNanoTechnology (CMi) at EPFL. Publisher Copyright: © OSA 2019 © 2019 The Author(s)

PY - 2019

Y1 - 2019

N2 - We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.

AB - We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.

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U2 - 10.1364/QIM.2019.F5A.67

DO - 10.1364/QIM.2019.F5A.67

M3 - Conference contribution

AN - SCOPUS:85085642794

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T3 - Optics InfoBase Conference Papers

BT - Quantum Information and Measurement, QIM 2019

PB - Optica Publishing Group (formerly OSA)

T2 - Quantum Information and Measurement, QIM 2019

Y2 - 4 April 2019 through 6 April 2019

ER -

Ultra-low dissipation mechanical resonators for cavity optomechanics

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