TY - GEN
T1 - Ultra-low dissipation mechanical resonators for cavity optomechanics
AU - Bereyhi, Mohammad J.
AU - Ghadimi, Amir H.
AU - Fedorov, Sergey A.
AU - Beccari, Alberto
AU - Schilling, Ryan
AU - Wilson, Dalziel J.
AU - Engelsen, Nils J.
AU - Kippenberg, Tobias J.
N1 - Funding Information:
This work was supported by the EU Horizon 2020 Research and Innovation Program under grant agreement no. 732894 (FET Proactive HOT) and the SNF Cavity Quantum Optomechanics project (grant no. 163387). M.J.B. is supported by MSCA ETN-OMT (grant no. 722923). T.J.K acknowledges support from ERC AdG (QuREM, grant no. 320966). All samples were fabricated at the Center for MicroNanoTechnology (CMi) at EPFL.
Funding Information:
Funding acknowledgements: This work was supported by the EU Horizon 2020 Research and Innovation Program under grant agreement no. 732894 (FET Proactive HOT) and the SNF Cavity Quantum Optomechanics project (grant no. 163387). M.J.B. is supported by MSCA ETN-OMT (grant no. 722923). T.J.K acknowledges support from ERC AdG (QuREM, grant no. 320966). All samples were fabricated at the Center for MicroNanoTechnology (CMi) at EPFL.
Publisher Copyright:
© OSA 2019 © 2019 The Author(s)
PY - 2019
Y1 - 2019
N2 - We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.
AB - We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.
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U2 - 10.1364/QIM.2019.F5A.67
DO - 10.1364/QIM.2019.F5A.67
M3 - Conference contribution
AN - SCOPUS:85085642794
SN - 9781943580569
T3 - Optics InfoBase Conference Papers
BT - Quantum Information and Measurement, QIM 2019
PB - OSA - The Optical Society
T2 - Quantum Information and Measurement, QIM 2019
Y2 - 4 April 2019 through 6 April 2019
ER -