Ultra-low crosstalk, CMOS compatible waveguide crossings for densely integrated photonic interconnection networks

Adam M. Jones; Christopher T. DeRose; Anthony L. Lentine; Douglas C. Trotter; Andrew L. Starbuck; Robert A. Norwood

doi:10.1364/OE.21.012002

Ultra-low crosstalk, CMOS compatible waveguide crossings for densely integrated photonic interconnection networks

Adam M. Jones
, Christopher T. DeRose
, Anthony L. Lentine
, Douglas C. Trotter
, Andrew L. Starbuck
, Robert A. Norwood

Optical Sciences

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

Abstract

We explore the design space for optimizing CMOS compatible waveguide crossings on a silicon photonics platform. This paper presents simulated and experimental excess loss and crosstalk suppression data for vertically integrated silicon nitride over silicon-on-insulator waveguide crossings. Experimental results show crosstalk suppression exceeding -49/-44 dB with simulation results as low as -65/-60 dB for the TE/TM mode in a waveguide crossing with a 410 nm vertical gap.

Original language	English (US)
Pages (from-to)	12002-12013
Number of pages	12
Journal	Optics Express
Volume	21
Issue number	10
DOIs	https://doi.org/10.1364/OE.21.012002
State	Published - May 20 2013

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.21.012002

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abstract = "We explore the design space for optimizing CMOS compatible waveguide crossings on a silicon photonics platform. This paper presents simulated and experimental excess loss and crosstalk suppression data for vertically integrated silicon nitride over silicon-on-insulator waveguide crossings. Experimental results show crosstalk suppression exceeding -49/-44 dB with simulation results as low as -65/-60 dB for the TE/TM mode in a waveguide crossing with a 410 nm vertical gap.",

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AU - Starbuck, Andrew L.

AU - Norwood, Robert A.

PY - 2013/5/20

Y1 - 2013/5/20

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AB - We explore the design space for optimizing CMOS compatible waveguide crossings on a silicon photonics platform. This paper presents simulated and experimental excess loss and crosstalk suppression data for vertically integrated silicon nitride over silicon-on-insulator waveguide crossings. Experimental results show crosstalk suppression exceeding -49/-44 dB with simulation results as low as -65/-60 dB for the TE/TM mode in a waveguide crossing with a 410 nm vertical gap.

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Ultra-low crosstalk, CMOS compatible waveguide crossings for densely integrated photonic interconnection networks

Abstract

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