TY - GEN
T1 - Ultra-High-Q Nanomechanics through Dissipation Dilution
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
AU - Engelsen, Nils J.
AU - Agrawal, Aman R.
AU - Wilson, Dalziel J.
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal 'soft-clamping, ' strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.
AB - Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal 'soft-clamping, ' strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.
KW - Nanomechanical resonator
KW - dissipation dilution
KW - quality factor
KW - quantum optomechanics
KW - silicon nitride
KW - stress
UR - https://www.scopus.com/pages/publications/85114962980
UR - https://www.scopus.com/pages/publications/85114962980#tab=citedBy
U2 - 10.1109/Transducers50396.2021.9495394
DO - 10.1109/Transducers50396.2021.9495394
M3 - Conference contribution
AN - SCOPUS:85114962980
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 201
EP - 205
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 20 June 2021 through 25 June 2021
ER -