TY - GEN
T1 - Ultra-High-Q Nanomechanics through Dissipation Dilution
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
AU - Engelsen, Nils J.
AU - Agrawal, Aman R.
AU - Wilson, Dalziel J.
N1 - Funding Information:
The authors thank Mohammad Bereyhi and Alberto Beccari for assistance with figures in the manuscript. N.J.E. acknowledges support from the Swiss National Science Foundation.
Funding Information:
The authors thank ohaM mmad Berey i and Aleb rto ecB cari for assistance iw th figures in the manuscript. .N .J .E acknowledges support from the iwS ss aN tional cS i-ence Foundation under grant no. 108 mA bizione.) .D .J W. acknowledges support from the aN tional cS ience Foundation under grant no. 149 5 2.
Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal 'soft-clamping, ' strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.
AB - Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal 'soft-clamping, ' strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.
KW - Nanomechanical resonator
KW - dissipation dilution
KW - quality factor
KW - quantum optomechanics
KW - silicon nitride
KW - stress
UR - http://www.scopus.com/inward/record.url?scp=85114962980&partnerID=8YFLogxK
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U2 - 10.1109/Transducers50396.2021.9495394
DO - 10.1109/Transducers50396.2021.9495394
M3 - Conference contribution
AN - SCOPUS:85114962980
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 201
EP - 205
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 20 June 2021 through 25 June 2021
ER -