Ultra-High-Q Nanomechanics through Dissipation Dilution: Trends and Perspectives

Nils J. Engelsen, Aman R. Agrawal, Dalziel J. Wilson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Strained nanomechanical resonators have recently achieved quality factors of 1 billion through the phenomenon of dissipation dilution. Remarkably, the potential of these devices seems unexhausted, exhibiting a scaling law of roughly one order of magnitude (in Q factor) every three years. This paper reviews advances which led to this point, including phononic crystal 'soft-clamping, ' strain engineering, and a trend towards centimeter-scale devices with extreme aspect ratios. Recent trends include investigation of strained crystalline thin films, fractal-patterned supports, and machine-learning-optimized supports. New possibilities emerging from these advances range from cavity free quantum optomechanics to ultra-sensitive accelerometry.

Original languageEnglish (US)
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages201-205
Number of pages5
ISBN (Electronic)9781665412674
DOIs
StatePublished - Jun 20 2021
Externally publishedYes
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: Jun 20 2021Jun 25 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period6/20/216/25/21

Keywords

  • Nanomechanical resonator
  • dissipation dilution
  • quality factor
  • quantum optomechanics
  • silicon nitride
  • stress

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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