Two-step retrace error calibration removing tilt ambiguity in coherence scanning interferometry

Lei Huang, Tianyi Wang, Corey Austin, Daewook Kim, Mourad Idir

Research output: Contribution to journalLetterpeer-review

Abstract

In interferometry measurement, the retrace error often limits its high-precision metrology applications. Retrace error calibration with tilted flats can give a relation between the retrace error and the introduced tilt angles, but there is still an ambiguity between the introduced tilt angles and the tilt terms in the created retrace error. We propose a novel, to the best of our knowledge, two-step calibration method to resolve this tilt ambiguity. It involves additional measurements of spherical mirror(s) with known curvature(s). The experiment shows that the curvature deviation due to the tilt ambiguity can be significantly reduced after applying the proposed method.

Original languageEnglish (US)
Pages (from-to)590-593
Number of pages4
JournalOptics letters
Volume49
Issue number3
DOIs
StatePublished - Feb 2024

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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