Tuning of MEMS devices using evolutionary computation and open-loop frequency response

Didier Keymeulen; Wolfgang Fink; Michael I. Ferguson; Chris Peay; Boris Oks; Richard Terrile; Karl Yee

doi:10.1109/AERO.2005.1559562

Tuning of MEMS devices using evolutionary computation and open-loop frequency response

Didier Keymeulen, Wolfgang Fink, Michael I. Ferguson, Chris Peay, Boris Oks, Richard Terrile, Karl Yee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

14 Scopus citations

Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

Original language	English (US)
Title of host publication	Proceedings - 2005 IEEE Aerospace Conference
DOIs	https://doi.org/10.1109/AERO.2005.1559562
State	Published - 2005
Externally published	Yes
Event	2005 IEEE Aerospace Conference - Big Sky, MT, United States Duration: Mar 5 2005 → Mar 12 2005

Publication series

Name	IEEE Aerospace Conference Proceedings
Volume	2005
ISSN (Print)	1095-323X

Other

Other	2005 IEEE Aerospace Conference
Country/Territory	United States
City	Big Sky, MT
Period	3/5/05 → 3/12/05

ASJC Scopus subject areas

Aerospace Engineering
Space and Planetary Science

Access to Document

10.1109/AERO.2005.1559562

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Keymeulen, D, Fink, W, Ferguson, MI, Peay, C, Oks, B, Terrile, R & Yee, K 2005, Tuning of MEMS devices using evolutionary computation and open-loop frequency response. in Proceedings - 2005 IEEE Aerospace Conference., 1559562, IEEE Aerospace Conference Proceedings, vol. 2005, 2005 IEEE Aerospace Conference, Big Sky, MT, United States, 3/5/05. https://doi.org/10.1109/AERO.2005.1559562

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AU - Keymeulen, Didier

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AU - Ferguson, Michael I.

AU - Peay, Chris

AU - Oks, Boris

AU - Terrile, Richard

AU - Yee, Karl

PY - 2005

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AB - We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

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BT - Proceedings - 2005 IEEE Aerospace Conference

T2 - 2005 IEEE Aerospace Conference

Y2 - 5 March 2005 through 12 March 2005

ER -

Tuning of MEMS devices using evolutionary computation and open-loop frequency response

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