Tribological, Thermal, Kinetic, and Pad Micro-Textural Studies Using Polyphenylene Sulfide Retaining Rings in Interlayer Dielectric Chemical Mechanical Planarization

Ara Philipossian, Yasa Sampurno, Michael Tustin, Anton Schranner

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Tribological, Thermal, Kinetic, and Pad Micro-Textural Studies Using Polyphenylene Sulfide Retaining Rings in Interlayer Dielectric Chemical Mechanical Planarization'. Together they form a unique fingerprint.

Keyphrases