Tribological, thermal, and wear characteristics of poly(phenylene sulfide) and polyetheretherketone retaining rings in interlayer dielectric CMP

Xiaomin Wei, Yun Zhuang, Yasa Sampurno, Fransisca Sudargho, Christopher Wargo, Leonard Borucki, Ara Philipossian

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science