Tribological, thermal, and kinetic attributes of 300 vs. 450 mm chemical mechanical planarization processes

Yubo Jiao, Xiaoyan Liao, Changhong Wu, Yun Zhuang, Yasa Sampurno, Ara Philipossian, Siannie Theng, Michael Goldstein

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chemical Compounds

Engineering & Materials Science