Treatment of chemical-mechanical planarization wastes by electrocoagulation/electro-fenton method

Kon Tsu Kin; Hong Shiang Tang; Shu Fei Chan; Srini Raghavan; Sergio Martinez

doi:10.1109/TSM.2006.873511

Treatment of chemical-mechanical planarization wastes by electrocoagulation/electro-fenton method

Kon Tsu Kin, Hong Shiang Tang, Shu Fei Chan, Srini Raghavan, Sergio Martinez

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

A method for the treatment of chemical-mechanical planaarization wastewater that utilizes the principles of electrocoagulation (EC) and electro-Fenton (EF) reactions has been investigated. The method consists of subjecting the wastewater to an applied electric field between two iron electrodes, in the presence of hydrogen peroxide. Dissolved iron is responsible for electrocoagulation, while the hydroxyl radicals produced through the reaction of dissolved iron species with hydrogen peroxide destroy dissolved organics. Over 95% of fine particles can be removed after sedimentation following exposure to electric field, and the turbidity of the clarified solution can be reduced to very low values (0.3 NTU).

Original language	English (US)
Pages (from-to)	208-215
Number of pages	8
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	19
Issue number	2
DOIs	https://doi.org/10.1109/TSM.2006.873511
State	Published - May 2006
Externally published	Yes

Keywords

CMP waste treatment
Chemical-mechanical planarization (CMP)
Electro-fenton
Electrocoagulation

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/TSM.2006.873511

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abstract = "A method for the treatment of chemical-mechanical planaarization wastewater that utilizes the principles of electrocoagulation (EC) and electro-Fenton (EF) reactions has been investigated. The method consists of subjecting the wastewater to an applied electric field between two iron electrodes, in the presence of hydrogen peroxide. Dissolved iron is responsible for electrocoagulation, while the hydroxyl radicals produced through the reaction of dissolved iron species with hydrogen peroxide destroy dissolved organics. Over 95% of fine particles can be removed after sedimentation following exposure to electric field, and the turbidity of the clarified solution can be reduced to very low values (0.3 NTU).",

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AU - Tang, Hong Shiang

AU - Chan, Shu Fei

AU - Raghavan, Srini

AU - Martinez, Sergio

PY - 2006/5

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AB - A method for the treatment of chemical-mechanical planaarization wastewater that utilizes the principles of electrocoagulation (EC) and electro-Fenton (EF) reactions has been investigated. The method consists of subjecting the wastewater to an applied electric field between two iron electrodes, in the presence of hydrogen peroxide. Dissolved iron is responsible for electrocoagulation, while the hydroxyl radicals produced through the reaction of dissolved iron species with hydrogen peroxide destroy dissolved organics. Over 95% of fine particles can be removed after sedimentation following exposure to electric field, and the turbidity of the clarified solution can be reduced to very low values (0.3 NTU).

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KW - Chemical-mechanical planarization (CMP)

KW - Electro-fenton

KW - Electrocoagulation

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Treatment of chemical-mechanical planarization wastes by electrocoagulation/electro-fenton method

Abstract

Keywords

ASJC Scopus subject areas

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