Transmission electron microscopy of PZT thin-films prepared by a sol-gel technique

Supapan Seraphin, Dan Zhou, G. Teowee, J. M. Boulton, D. R. Uhlmann

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


The microstructures of lead zirconate titanate (PZT) thin films prepared by a sol-gel technique was investigated using transmission electron microscopy (TEM) and transmission electron diffraction. We investigated the microstructure of three sets of thin films with different chemical compositions: PZT 53/47 films with no excess PbO; with excess PbO; and PZT 65/35 with no excess PbO. All samples were fired for 30 minutes at temperatures ranging from 400C to 700C. Incorporation of excess PbO in the 53/47 film fired at 450C resulted in polycrystalline perovskite grains with an average grain size of less than 0.1 μm. Grain boundaries are decorated by 5-10 nm diameter precipitates possibly caused by the segregation of remnant pyrochlore or excess PbO. The films have high values of dielectric constant (up to 2500) when fired at 700C. PZT 65/35 fired at 700C consists of two distinct phases: a fine-grained matrix of pyrochlore, and 10-μm diameter rosettes of perovskite. The correlations between the compositions, the microstructures of the films, and their processing conditions on the one hand, and ferroelectric properties on the others are discussed.

Original languageEnglish (US)
Pages (from-to)369-374
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1993
EventProceedings of the 1993 Spring Meeting of the Materials Research Society - San Francisco, CA, USA
Duration: Apr 14 1993Apr 16 1993

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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