@inproceedings{a16bb351eb614c95acfcb4042df64f72,
title = "Transient microscopic testing method based on deflectometry",
abstract = "The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.",
keywords = "Large dynamic range, Microscopic deflectometry, Transient test, Wavefront aberration",
author = "Hanting Gu and Daodang Wang and Zhongming Xie and Ming Kong and Rongguang Liang and Wentao Zhang",
note = "Funding Information: The activities of this work are supported by National Natural Science Foundation of China (NSFC) (51775528), Guangxi Key Laboratory of Optoelectroric Information Processing (GD18205), Zhejiang Provincial Natural Science Foundation of China (LY17E050014), China Postdoctoral Science Foundation (2017M621928), Zhejiang Key Discipline of Instrument Science and Technology (JL150508). Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; Optical Design and Testing IX 2019 ; Conference date: 21-10-2019 Through 22-10-2019",
year = "2019",
doi = "10.1117/12.2537149",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yongtian Wang and Pablo Benitez and Osamu Matoba",
booktitle = "Optical Design and Testing IX",
}