Transient microscopic testing method based on deflectometry

Hanting Gu; Daodang Wang; Zhongming Xie; Ming Kong; Rongguang Liang; Wentao Zhang

doi:10.1117/12.2537149

Transient microscopic testing method based on deflectometry

Hanting Gu, Daodang Wang, Zhongming Xie, Ming Kong, Rongguang Liang, Wentao Zhang

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

Original language	English (US)
Title of host publication	Optical Design and Testing IX
Editors	Yongtian Wang, Pablo Benitez, Osamu Matoba
Publisher	SPIE
ISBN (Electronic)	9781510630871
DOIs	https://doi.org/10.1117/12.2537149
State	Published - 2019
Event	Optical Design and Testing IX 2019 - Hangzhou, China Duration: Oct 21 2019 → Oct 22 2019

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11185
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Optical Design and Testing IX 2019
Country/Territory	China
City	Hangzhou
Period	10/21/19 → 10/22/19

Keywords

Large dynamic range
Microscopic deflectometry
Transient test
Wavefront aberration

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2537149

Cite this

Transient microscopic testing method based on deflectometry. / Gu, Hanting; Wang, Daodang; Xie, Zhongming et al.
Optical Design and Testing IX. ed. / Yongtian Wang; Pablo Benitez; Osamu Matoba. SPIE, 2019. 111850R (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11185).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gu, H, Wang, D, Xie, Z, Kong, M, Liang, R & Zhang, W 2019, Transient microscopic testing method based on deflectometry. in Y Wang, P Benitez & O Matoba (eds), Optical Design and Testing IX., 111850R, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11185, SPIE, Optical Design and Testing IX 2019, Hangzhou, China, 10/21/19. https://doi.org/10.1117/12.2537149

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title = "Transient microscopic testing method based on deflectometry",

abstract = "The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.",

keywords = "Large dynamic range, Microscopic deflectometry, Transient test, Wavefront aberration",

author = "Hanting Gu and Daodang Wang and Zhongming Xie and Ming Kong and Rongguang Liang and Wentao Zhang",

note = "Funding Information: The activities of this work are supported by National Natural Science Foundation of China (NSFC) (51775528), Guangxi Key Laboratory of Optoelectroric Information Processing (GD18205), Zhejiang Provincial Natural Science Foundation of China (LY17E050014), China Postdoctoral Science Foundation (2017M621928), Zhejiang Key Discipline of Instrument Science and Technology (JL150508). Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; Optical Design and Testing IX 2019 ; Conference date: 21-10-2019 Through 22-10-2019",

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doi = "10.1117/12.2537149",

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series = "Proceedings of SPIE - The International Society for Optical Engineering",

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AU - Gu, Hanting

AU - Wang, Daodang

AU - Xie, Zhongming

AU - Kong, Ming

AU - Liang, Rongguang

AU - Zhang, Wentao

N1 - Funding Information: The activities of this work are supported by National Natural Science Foundation of China (NSFC) (51775528), Guangxi Key Laboratory of Optoelectroric Information Processing (GD18205), Zhejiang Provincial Natural Science Foundation of China (LY17E050014), China Postdoctoral Science Foundation (2017M621928), Zhejiang Key Discipline of Instrument Science and Technology (JL150508). Publisher Copyright: © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

PY - 2019

Y1 - 2019

N2 - The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

AB - The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

KW - Large dynamic range

KW - Microscopic deflectometry

KW - Transient test

KW - Wavefront aberration

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M3 - Conference contribution

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Design and Testing IX

A2 - Wang, Yongtian

A2 - Benitez, Pablo

A2 - Matoba, Osamu

PB - SPIE

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ER -

Transient microscopic testing method based on deflectometry

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Keywords

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