@inproceedings{9dfb4719856a48949a38005905fbcdf6,
title = "TOWARDS DIFFRACTION-LIMITED X-RAY OPTICS",
abstract = "Improvements to the surface metrology of highly off-axis, conic section optical surfaces are presented as they relate to grazing incidence X-ray mirrors for soft X-ray wavelengths. Improved surface metrology of ellipsoidal mirrors at visible wavelengths will be used to generate surface maps for ion-beam figuring. The metrology advances will be validated by comparing the X-ray Point Spread Functions (PSF) produced before and after mirror figuring. X-ray optical alignment techniques of ellipsoidal mirrors as well as at wavelength (6.76 nm) metrology will also be discussed.",
author = "Whalen, \{Mallory M.\} and Alan Garner and Heine, \{Sarah N.T.\} and Chalifoux, \{Brandon D.\} and Marshall, \{Herman L.\} and Heilmann, \{Ralf K.\} and Schattenburg, \{Mark L.\}",
note = "Publisher Copyright: {\textcopyright} 2024 Proceedings - ASPE 2024 Annual Meeting. All rights reserved.; 39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024 ; Conference date: 05-11-2024 Through 08-11-2024",
year = "2024",
language = "English (US)",
series = "Proceedings - ASPE 2024 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "44--47",
booktitle = "Proceedings - ASPE 2024 Annual Meeting",
}