Tolerance issues in solid immersion lens systems

Joshua Sseunhyeun Jo; Tom D. Milster

doi:10.1117/12.453426

Tolerance issues in solid immersion lens systems

Joshua Sseunhyeun Jo, Tom D. Milster

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Analysis that includes physical optics with diffraction, polarization, and aberration, as well as geometrical optics is used to understand tolerancing of SIL systems. Irradiance distributions inside a simple substrate are explored as the distance between the objective lens and SIL and the radius of curvature of the SIL are varied. Gap-induced aberration is included in the analysis. Irradiance distributions inside a phase-change recoding medium are explored as the decentration of the SIL and angular misalignment of the incident beam onto the objective lens are changed. Reflection characteristics are explored versus air gap heights and the thickness of the recording layer in a magneto-optical medium

Original language	English (US)
Pages (from-to)	312-319
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4342
DOIs	https://doi.org/10.1117/12.453426
State	Published - 2002
Externally published	Yes

Keywords

Magneto-optical medium
Phase-change medium
Reflection coefficient
SIL
Tolerance
Vector diffraction

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.453426

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title = "Tolerance issues in solid immersion lens systems",

abstract = "Analysis that includes physical optics with diffraction, polarization, and aberration, as well as geometrical optics is used to understand tolerancing of SIL systems. Irradiance distributions inside a simple substrate are explored as the distance between the objective lens and SIL and the radius of curvature of the SIL are varied. Gap-induced aberration is included in the analysis. Irradiance distributions inside a phase-change recoding medium are explored as the decentration of the SIL and angular misalignment of the incident beam onto the objective lens are changed. Reflection characteristics are explored versus air gap heights and the thickness of the recording layer in a magneto-optical medium",

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AU - Jo, Joshua Sseunhyeun

AU - Milster, Tom D.

PY - 2002

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AB - Analysis that includes physical optics with diffraction, polarization, and aberration, as well as geometrical optics is used to understand tolerancing of SIL systems. Irradiance distributions inside a simple substrate are explored as the distance between the objective lens and SIL and the radius of curvature of the SIL are varied. Gap-induced aberration is included in the analysis. Irradiance distributions inside a phase-change recoding medium are explored as the decentration of the SIL and angular misalignment of the incident beam onto the objective lens are changed. Reflection characteristics are explored versus air gap heights and the thickness of the recording layer in a magneto-optical medium

KW - Magneto-optical medium

KW - Phase-change medium

KW - Reflection coefficient

KW - SIL

KW - Tolerance

KW - Vector diffraction

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JF - Proceedings of SPIE - The International Society for Optical Engineering

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Tolerance issues in solid immersion lens systems

Abstract

Keywords

ASJC Scopus subject areas

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