TY - JOUR
T1 - Titanium oxide sol-gel films with tunable refractive index
AU - Himmelhuber, Roland
AU - Gangopadhyay, Palash
AU - Norwood, Robert A.
AU - Loy, Douglas A.
AU - Peyghambarian, Nasser
N1 - Funding Information:
The authors would like to acknowledge support from the National Science Foundation through MDITR (Grant#-0120967), CIAN (Grant#-EEC0812072) and GEO-photonics (Award#0946131), Canon, Inc., the Research Initiative Fund (TRIF) through the Photonics Initiative for graduate student support as well as Veeco through Energy Lab Grant 2010. The authors would also like to thank Kenneth Nebesny and Paul Lee for measuring the XPS spectra.
PY - 2011/6/1
Y1 - 2011/6/1
N2 - Glycidylmethacrylate and propylene oxide were used in the epoxide initiated formation of titanium oxide sols which were spun to form thin films. Glycidylmethacrylate can be used to tune the refractive index of the resulting composite and allowed us to photo-pattern the material. The refractive index of the films can be controlled between 1.76 and 2.05 at 589 nm. The thicknesses of the films ranged between 80 and 200 nm and the rms roughness below 2 nm. The films were characterized by atomic force microscopy (AFM), electric force microscopy (EFM), x-ray photoelectron spectroscopy (XPS) and ellipsometry, among other techniques.
AB - Glycidylmethacrylate and propylene oxide were used in the epoxide initiated formation of titanium oxide sols which were spun to form thin films. Glycidylmethacrylate can be used to tune the refractive index of the resulting composite and allowed us to photo-pattern the material. The refractive index of the films can be controlled between 1.76 and 2.05 at 589 nm. The thicknesses of the films ranged between 80 and 200 nm and the rms roughness below 2 nm. The films were characterized by atomic force microscopy (AFM), electric force microscopy (EFM), x-ray photoelectron spectroscopy (XPS) and ellipsometry, among other techniques.
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U2 - 10.1364/OME.1.000252
DO - 10.1364/OME.1.000252
M3 - Article
AN - SCOPUS:80052257107
SN - 2159-3930
VL - 1
SP - 252
EP - 258
JO - Optical Materials Express
JF - Optical Materials Express
IS - 2
ER -