Titanium oxide sol-gel films with tunable refractive index

Roland Himmelhuber, Palash Gangopadhyay, Robert A. Norwood, Douglas A. Loy, Nasser Peyghambarian

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


Glycidylmethacrylate and propylene oxide were used in the epoxide initiated formation of titanium oxide sols which were spun to form thin films. Glycidylmethacrylate can be used to tune the refractive index of the resulting composite and allowed us to photo-pattern the material. The refractive index of the films can be controlled between 1.76 and 2.05 at 589 nm. The thicknesses of the films ranged between 80 and 200 nm and the rms roughness below 2 nm. The films were characterized by atomic force microscopy (AFM), electric force microscopy (EFM), x-ray photoelectron spectroscopy (XPS) and ellipsometry, among other techniques.

Original languageEnglish (US)
Pages (from-to)252-258
Number of pages7
JournalOptical Materials Express
Issue number2
StatePublished - Jun 1 2011

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials


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