TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators

C. C. Ma; Z. J. Wu; Q. P. Sun; Y. Zohar; M. Wong

TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators

C. C. Ma, Z. J. Wu, Q. P. Sun, Y. Zohar, M. Wong

Research output: Contribution to conference › Paper › peer-review

Abstract

The operation of an SMA actuator at temperatures higher than the transformation temperatures of a stress-free film was demonstrated. Flat frequency response up to 2Hz and maximum amplitude of 4μm was possible.

Original language	English (US)
Pages	84-87
Number of pages	4
State	Published - Jun 5 1999
Externally published	Yes
Event	1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99) - Shatin, Hong Kong Duration: Jun 26 1999 → Jun 26 1999

Other

Other	1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99)
City	Shatin, Hong Kong
Period	6/26/99 → 6/26/99

ASJC Scopus subject areas

General Engineering

Cite this

@conference{772a3ace84b54127a231deb88de3eb97,

title = "TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators",

abstract = "The operation of an SMA actuator at temperatures higher than the transformation temperatures of a stress-free film was demonstrated. Flat frequency response up to 2Hz and maximum amplitude of 4μm was possible.",

author = "Ma, {C. C.} and Wu, {Z. J.} and Sun, {Q. P.} and Y. Zohar and M. Wong",

year = "1999",

month = jun,

day = "5",

language = "English (US)",

pages = "84--87",

note = "1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99) ; Conference date: 26-06-1999 Through 26-06-1999",

}

TY - CONF

T1 - TiNi shape memory alloy thin film rotating actuator topic D

T2 - 1999 IEEE Hong Kong Electron Devices Meeting (HKEDM99)

AU - Ma, C. C.

AU - Wu, Z. J.

AU - Sun, Q. P.

AU - Zohar, Y.

AU - Wong, M.

PY - 1999/6/5

Y1 - 1999/6/5

N2 - The operation of an SMA actuator at temperatures higher than the transformation temperatures of a stress-free film was demonstrated. Flat frequency response up to 2Hz and maximum amplitude of 4μm was possible.

AB - The operation of an SMA actuator at temperatures higher than the transformation temperatures of a stress-free film was demonstrated. Flat frequency response up to 2Hz and maximum amplitude of 4μm was possible.

UR - http://www.scopus.com/inward/record.url?scp=0033293609&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033293609&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0033293609

SP - 84

EP - 87

Y2 - 26 June 1999 through 26 June 1999

ER -

TiNi shape memory alloy thin film rotating actuator topic D: sensors and actuators

Abstract

Other

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this