We describe a highly sensitive chemical sensor scheme using a Si3N4 channel waveguide with a selective surface coating based on polarimetric Zeeman interferometry. The sensing is based on measurement of the phase difference between TE and TM modes propagating in the anisotropic waveguide structure under exposure to toluene vapour. A real-time and reversible response at low ppm level is observed. Modelling results of the sensor structure to further increase its sensitivity are presented.
|Original language||English (US)|
|Number of pages||11|
|Journal||Pure and Applied Optics (Print edition) (United Kingdom)|
|State||Published - Nov 1998|
ASJC Scopus subject areas
- Physics and Astronomy(all)