@inproceedings{4777d9e9ae3140a4ba80f546ae1c9656,
title = "Thermal, tribological and kinetic ramifications of ceria slurry dilution and dispense methods in STI CMP",
author = "Ruochen Han and Matthew Bahr and Yasa Sampurno and Leonard Borucki and Ara Philipossian",
year = "2017",
language = "English (US)",
series = "ICPT 2017 - International Conference on Planarization/CMP Technology",
publisher = "VDE Verlag GmbH",
pages = "119",
booktitle = "ICPT 2017 - International Conference on Planarization/CMP Technology",
address = "Germany",
note = "2017 International Conference on Planarization/CMP Technology, ICPT 2017 ; Conference date: 11-10-2017 Through 13-10-2017",
}