The Activity of HF/H2O Treated Silicon Surfaces in Ambient Air Before and After Gate Oxidation

Ara PhiliDossian

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'The Activity of HF/H2O Treated Silicon Surfaces in Ambient Air Before and After Gate Oxidation'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science