Testing of a micro Faraday cup array for ion detection in SIMS

Jan Lorincik; M. Bonner Denton; Roger P. Sperline; Erick T. Young; Peter Williams

doi:10.1080/00032719.2010.511739

Testing of a micro Faraday cup array for ion detection in SIMS

Jan Lorincik, M. Bonner Denton, Roger P. Sperline, Erick T. Young, Peter Williams

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either O⁺₂ or Cs⁺ primary ions with or without D₂O flooding and detecting secondary ions of Si^±, SiH^±, O^-, SiD^-, OD^-. A parallel detection of near masses of ²⁹Si and ²⁸SiH or ¹⁸O and ¹⁶OD was demonstrated at a sensitivity level ~230 counts/s.

Original language	English (US)
Pages (from-to)	1050-1057
Number of pages	8
Journal	Analytical Letters
Volume	44
Issue number	6
DOIs	https://doi.org/10.1080/00032719.2010.511739
State	Published - Apr 2011
Externally published	Yes

Keywords

Capacitance transimpedance amplifier
Faraday cup
Ion detection
SIMS

ASJC Scopus subject areas

Analytical Chemistry
Biochemistry
Spectroscopy
Clinical Biochemistry
Biochemistry, medical
Electrochemistry

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10.1080/00032719.2010.511739

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title = "Testing of a micro Faraday cup array for ion detection in SIMS",

abstract = "A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either O+2 or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si±, SiH±, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level ~230 counts/s.",

keywords = "Capacitance transimpedance amplifier, Faraday cup, Ion detection, SIMS",

author = "Jan Lorincik and Denton, {M. Bonner} and Sperline, {Roger P.} and Young, {Erick T.} and Peter Williams",

note = "Funding Information: Received 25 January 2010; accepted 14 April 2010. We are thankful to Dr. Klaus Franzreb from ASU for help with the IMS3f alignment and for valuable comments to this work. This work was supported by NASA Grant NAG5–11899 and by the grant of the Ministry of Education, Youth, and Sports of the Czech Republic ME894. Address correspondence to Jan Lorincik, Institute of Photonics and Electronics AS CR v.v.i., Chaberska 57, Prague 8, 18251 Czech Republic. E-mail: [email protected]",

year = "2011",

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doi = "10.1080/00032719.2010.511739",

language = "English (US)",

volume = "44",

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T1 - Testing of a micro Faraday cup array for ion detection in SIMS

AU - Lorincik, Jan

AU - Denton, M. Bonner

AU - Sperline, Roger P.

AU - Young, Erick T.

AU - Williams, Peter

N1 - Funding Information: Received 25 January 2010; accepted 14 April 2010. We are thankful to Dr. Klaus Franzreb from ASU for help with the IMS3f alignment and for valuable comments to this work. This work was supported by NASA Grant NAG5–11899 and by the grant of the Ministry of Education, Youth, and Sports of the Czech Republic ME894. Address correspondence to Jan Lorincik, Institute of Photonics and Electronics AS CR v.v.i., Chaberska 57, Prague 8, 18251 Czech Republic. E-mail: [email protected]

PY - 2011/4

Y1 - 2011/4

N2 - A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either O+2 or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si±, SiH±, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level ~230 counts/s.

AB - A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either O+2 or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si±, SiH±, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level ~230 counts/s.

KW - Capacitance transimpedance amplifier

KW - Faraday cup

KW - Ion detection

KW - SIMS

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JO - Analytical Letters

JF - Analytical Letters

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ER -

Testing of a micro Faraday cup array for ion detection in SIMS

Abstract

Keywords

ASJC Scopus subject areas

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