@inproceedings{1fdaceafa1434508bf074a48a2c2c7e5,
title = "Systems-level integration for focused beam scatterometry",
author = "Gillmer, {Steven R.} and Head, {Stephen T.} and Theisen, {Michael J.} and Brown, {Thomas G.} and Ellis, {Jonathan D.}",
year = "2015",
language = "English (US)",
series = "Proceedings - ASPE 2015 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "120--125",
booktitle = "Proceedings - ASPE 2015 Annual Meeting",
note = "30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 ; Conference date: 01-11-2015 Through 06-11-2015",
}