Abstract
The use of simulated annealing is proposed for automatic design of electrostatic lenses with given first-order properties and minimum aberrations. The synthesis of a high-quality lens for focusing an ion beam produced by a liquid-metal source is shown as an example.
Original language | English (US) |
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Pages (from-to) | 5087-5089 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 66 |
Issue number | 10 |
DOIs | |
State | Published - 1989 |
ASJC Scopus subject areas
- General Physics and Astronomy