Swing arm optical CMM: Self calibration with dual probe shear test

Peng Su, Yuhao Wang, Chang Jin Oh, Robert E. Parks, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Scopus citations


Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing IX
StatePublished - 2011
EventOptical Manufacturing and Testing IX - San Diego, CA, United States
Duration: Aug 22 2011Aug 24 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherOptical Manufacturing and Testing IX
Country/TerritoryUnited States
CitySan Diego, CA


  • Aspherics
  • Optical testing
  • SOC
  • Shear test
  • Stitching
  • Swing arm profilometer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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