Swing arm optical CMM for aspherics

Peng Su; Chang Jin Oh; Robert E. Parks; James H. Burge

doi:10.1117/12.828493

Swing arm optical CMM for aspherics

Peng Su
, Chang Jin Oh
, Robert E. Parks
, James H. Burge

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

48 Scopus citations

Abstract

A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

Original language	English (US)
Title of host publication	Optical Manufacturing and Testing VIII
DOIs	https://doi.org/10.1117/12.828493
State	Published - 2009
Event	Optical Manufacturing and Testing VIII - San Diego, CA, United States Duration: Aug 4 2009 → Aug 5 2009

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7426
ISSN (Print)	0277-786X

Other

Other	Optical Manufacturing and Testing VIII
Country/Territory	United States
City	San Diego, CA
Period	8/4/09 → 8/5/09

Keywords

Aspherics
CMM
Optical testing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.828493

Cite this

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title = "Swing arm optical CMM for aspherics",

abstract = "A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.",

keywords = "Aspherics, CMM, Optical testing",

author = "Peng Su and Oh, \{Chang Jin\} and Parks, \{Robert E.\} and Burge, \{James H.\}",

year = "2009",

doi = "10.1117/12.828493",

language = "English (US)",

isbn = "9780819477163",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Optical Manufacturing and Testing VIII",

note = "Optical Manufacturing and Testing VIII ; Conference date: 04-08-2009 Through 05-08-2009",

}

TY - GEN

T1 - Swing arm optical CMM for aspherics

AU - Su, Peng

AU - Oh, Chang Jin

AU - Parks, Robert E.

AU - Burge, James H.

PY - 2009

Y1 - 2009

N2 - A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

AB - A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

KW - Aspherics

KW - CMM

KW - Optical testing

UR - https://www.scopus.com/pages/publications/70349922800

UR - https://www.scopus.com/pages/publications/70349922800#tab=citedBy

U2 - 10.1117/12.828493

DO - 10.1117/12.828493

M3 - Conference contribution

AN - SCOPUS:70349922800

SN - 9780819477163

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Manufacturing and Testing VIII

T2 - Optical Manufacturing and Testing VIII

Y2 - 4 August 2009 through 5 August 2009

ER -

Swing arm optical CMM for aspherics

Abstract

Publication series

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Keywords

ASJC Scopus subject areas

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