Swing arm optical CMM for aspherics

Peng Su, Chang Jin Oh, Robert E. Parks, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

42 Scopus citations


A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing VIII
StatePublished - 2009
EventOptical Manufacturing and Testing VIII - San Diego, CA, United States
Duration: Aug 4 2009Aug 5 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherOptical Manufacturing and Testing VIII
Country/TerritoryUnited States
CitySan Diego, CA


  • Aspherics
  • CMM
  • Optical testing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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