@inproceedings{b38ef6c815e246c08707f96f2c74d7da,
title = "Swing arm optical CMM",
abstract = "A profilometer for in situ measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built in the Optical Fabrication and Engineering Facility at the College of Optical Sciences, and has been used for measuring the figure of 1.4 m mirrors with a performance rivaling full aperture interferometric tests. The SOC uses a swing arm geometry as a means of supporting a distance measuring interferometric sensor a constant distance from, and pointed along a normal to, the center of curvature of a best fit spherical surface. Thus the sensor measures only the difference between the best fit sphere and the aspheric mirror profile. When the topography of the final mirror figure constructed from 64 profile scans is compared with the full aperture Fizeau test less than 5 nm accuracy is expected.",
author = "Peng Su and Oh, {Chang Jin} and Parks, {Robert E.} and Burge, {James H.}",
year = "2009",
language = "English (US)",
isbn = "9781887706490",
series = "Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009",
pages = "20--25",
booktitle = "Proceedings - ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009",
note = "ASPE Spring Topical Meeting on Mechanical Metrology and Measurement Uncertainty, ASPE 2009 ; Conference date: 06-04-2009 Through 07-04-2009",
}