Fingerprint
Dive into the research topics of 'Surface reactions of TiCl4 and Al(CH3)3 on GaAs(100) during the first half-cycle of atomic layer deposition'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Surface reactions of TiCl4 and Al(CH3)3 on GaAs(100) during the first half-cycle of atomic layer deposition
Bernal Granados-Alpizar, Anthony J. Muscat
Research output: Contribution to journal › Article › peer-review
17
Scopus
citations