Surface profiler for fixed through glass measurement

Sen Han; Erik Novak; John Wissinger; Bryan Guenther; Trisha Browne; Emilio Yanine; Mike Schurig; J. D. Herron; Christy McCloy; Xueyuan Li; Michael Krell; Jim Harris

doi:10.1117/12.597080

Surface profiler for fixed through glass measurement

Sen Han
, Erik Novak
, John Wissinger
, Bryan Guenther
, Trisha Browne
, Emilio Yanine
, Mike Schurig
, J. D. Herron
, Christy McCloy
, Xueyuan Li
, Michael Krell
, Jim Harris

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

Original language	English (US)
Article number	24
Pages (from-to)	189-197
Number of pages	9
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5716
DOIs	https://doi.org/10.1117/12.597080
State	Published - 2005
Externally published	Yes
Event	Reliability, Packaging, Testing and Characterization of MEMS/MOEMS IV - San Jose, CA, United States Duration: Jan 24 2005 → Jan 25 2005

Keywords

Interferometric profiler
Packaged MEMS or MOEMs measurement
Surface profiler
Through glass measurement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Biomaterials
Radiology Nuclear Medicine and imaging

Access to Document

10.1117/12.597080

Cite this

@article{e3f16c3947194213bce3ea3984cd1c34,

title = "Surface profiler for fixed through glass measurement",

abstract = "An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.",

keywords = "Interferometric profiler, Packaged MEMS or MOEMs measurement, Surface profiler, Through glass measurement",

author = "Sen Han and Erik Novak and John Wissinger and Bryan Guenther and Trisha Browne and Emilio Yanine and Mike Schurig and Herron, \{J. D.\} and Christy McCloy and Xueyuan Li and Michael Krell and Jim Harris",

year = "2005",

doi = "10.1117/12.597080",

language = "English (US)",

volume = "5716",

pages = "189--197",

journal = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",

issn = "1605-7422",

publisher = "SPIE",

note = "Reliability, Packaging, Testing and Characterization of MEMS/MOEMS IV ; Conference date: 24-01-2005 Through 25-01-2005",

}

TY - JOUR

T1 - Surface profiler for fixed through glass measurement

AU - Han, Sen

AU - Novak, Erik

AU - Wissinger, John

AU - Guenther, Bryan

AU - Browne, Trisha

AU - Yanine, Emilio

AU - Schurig, Mike

AU - Herron, J. D.

AU - McCloy, Christy

AU - Li, Xueyuan

AU - Krell, Michael

AU - Harris, Jim

PY - 2005

Y1 - 2005

N2 - An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

AB - An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

KW - Interferometric profiler

KW - Packaged MEMS or MOEMs measurement

KW - Surface profiler

KW - Through glass measurement

UR - https://www.scopus.com/pages/publications/21844460797

UR - https://www.scopus.com/pages/publications/21844460797#tab=citedBy

U2 - 10.1117/12.597080

DO - 10.1117/12.597080

M3 - Conference article

AN - SCOPUS:21844460797

SN - 1605-7422

VL - 5716

SP - 189

EP - 197

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

M1 - 24

T2 - Reliability, Packaging, Testing and Characterization of MEMS/MOEMS IV

Y2 - 24 January 2005 through 25 January 2005

ER -

Surface profiler for fixed through glass measurement

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this