Surface profiler for fixed through glass measurement

Sen Han, Erik Novak, John Wissinger, Bryan Guenther, Trisha Browne, Emilio Yanine, Mike Schurig, J. D. Herron, Christy McCloy, Xueyuan Li, Michael Krell, Jim Harris

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

Original languageEnglish (US)
Article number24
Pages (from-to)189-197
Number of pages9
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
StatePublished - 2005
Externally publishedYes
EventReliability, Packaging, Testing and Characterization of MEMS/MOEMS IV - San Jose, CA, United States
Duration: Jan 24 2005Jan 25 2005


  • Interferometric profiler
  • Packaged MEMS or MOEMs measurement
  • Surface profiler
  • Through glass measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Biomaterials
  • Radiology Nuclear Medicine and imaging


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