@inproceedings{0dd8214ee37a45aa92447153358ea12d,
title = "SURFACE FIGURE METROLOGY BASED ON GEOMETRIC PHASE COMPONENTS",
author = "Park, \{Hyo Mi\} and Jeong, \{Hyo Bin\} and Ghim, \{Young Sik\} and Daewook Kim and Guthery, \{Charlotte E.\} and Joo, \{Ki Nam\}",
note = "Funding Information: It is noted that this conference proceeding is written and modified based on the journal paper s [5 ,6 ]. This research is supported by the Basic Science Research Program through the National Research Foundation of oK rea (NRF 2021R1A2C1008661) .; 2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop ; Conference date: 06-03-2023 Through 07-03-2023",
year = "2023",
language = "English (US)",
series = "2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop",
publisher = "American Society for Precision Engineering, ASPE",
pages = "26--29",
booktitle = "2023 ASPE Winter Topical Meeting",
}